| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing system, a method for processing the substrate, and a program for executing the method, which can reduce huge working man-hours of software engineers. SOLUTION: The substrate processing system 100 comprises a substrate processing apparatus 101, a substrate process control apparatus 102 for controlling the substrate processing apparatus 101, and a server 103 for storing commands which are the statements, each of which defines operation of each device. The substrate process control apparatus 102 includes a macrofile editor section 107 containing a RAM 105, which is a work space for forming or for modifying a macrofile that corresponds to each process step profiled from the substrate process, and an executor 108 constituted by a CPU and the like that execute the process-sequence macro which is combined with the macrofile formed. A user forms or modifies the macrofile which indicates the sequence operation for each process step by listing the stored commands at the macrofile editor section 107. COPYRIGHT: (C)2005,JPO&NCIPI |
