METHODS AND APPARATUS FOR SEALING AN OPENING OF A PROCESSING CHAMBER

摘要

In one embodiment, a slit valve (101) is provided that is adapted to seal an opening and that includes a valve housing (105) having a first wall, a first opening (115) formed in the first wall, a second wall and a second opening (117) formed in the second wall. The slit valve also includes a closure member (103) having a sealing portion (107) adapted to contact the second wall and seal the second opening, and a bracing member (109) moveable relative to the sealing portion and adapted to contact the first wall. The slit valve further includes at least one actuating mechanism adapted to (1) move the sealing portion toward the second wall and into contact with the second wall; and (2) move the bracing member away from the sealing portion and into contact with the first wall so as to brace the sealing portion against the second wall. Numerous other aspects are provided.