| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an easy-to-manufacture micro pump having small and firm construction for stabilizing pumping performance. <P>SOLUTION: The micro pump comprises a vibration plate held between a lower side substrate and an upper side substrate and adopted to be vibrated by a vibrator and having a vent hole, and a back pressure chamber and a suction/exhaust chamber with a suction port formed between the vibration plate and the upper side substrate and between the vibration plate and the lower side substrate where a pump discharge port is provided, respectively. A semiconductor substrate which has the vibration plate formed by using wet etching for giving a thinner film onto part of the surface of a semiconductor wafer 100 is held between the lower side substrate and the upper side substrate. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
