| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology which forms a micro metal bump on a flexible substrate accurately. SOLUTION: The manufacturing method for the flexible substrate grows the metal bump 16 by using a mask film 13 patterned by a photolithography process. As an opening is not formed in a polyimide film by using a laser light, the micro opening is formed accurately, and as a result the micro metal bump 16 is formed accurately. After the metal bump 16 is formed, the mask film 13 is removed, a liquid resin raw material is coated, a coat is formed by drying it, and then a resin film is obtained by curing it. A tip portion of the metal bump 16 is exposed if a surface portion is etched at the coating step. COPYRIGHT: (C)2005,JPO&NCIPI |
