MANUFACTURING METHOD FOR MEMS ELEMENT

摘要

PROBLEM TO BE SOLVED: To form an MEMS element by adhering without increasing in manufacturing cost. SOLUTION: A spacer pattern 801 made of conductive paste is selectively formed on a supporting member 125 by transferring a part of a conductive paste pattern 601 selectively formed on a transfer plate 300. A frame part 103a of a mirror substrate 100 is adhered to the spacer pattern 801. COPYRIGHT: (C)2005,JPO&NCIPI