发明名称 |
Determination and correction for laser induced CCD camera degradation |
摘要 |
A process for the determination and correction of laser induced damages of the optical and electronic components within the beam path of a monitor module of a 193 nm excimer lasers is provided herein. Especially state of the art detectors like CCD cameras degrade under UV radiation. With a special correction of the sensitivity of each camera pixel this problem can be solved.
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申请公布号 |
US2004233306(A1) |
申请公布日期 |
2004.11.25 |
申请号 |
US20030718484 |
申请日期 |
2003.11.20 |
申请人 |
BASTING DIRK L.;SCHMIDT KAI;BALD HOLGER;SCHRAMM CHRISTIAN |
发明人 |
BASTING DIRK L.;SCHMIDT KAI;BALD HOLGER;SCHRAMM CHRISTIAN |
分类号 |
G03F7/20;H04N1/401;H04N5/365;H04N9/64;H04N17/00;(IPC1-7):H04N9/64 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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