| 摘要 |
PROBLEM TO BE SOLVED: To provide a clearance measuring method for measuring easily a clearance formed between the first object and the second object. SOLUTION: This method has a glass plate 18 forming the clearance g between itself and a plate 16 and having the second wall surface working as a mirror surface for reflecting the first wall surface as a virtual image, the first camera 34b having the first CCD 36b for imaging the first wall surface and the virtual image near the first opening 19a and having the first focal depth narrower than the clearance depth, and the second camera 34a having the second CCD 36a for imaging the first wall surface and the virtual image near the second opening 19b and having the second focal depth narrower than the depth. The first irradiation surface for irradiating to the first opening 19a is arranged concentrically with the first CCD 36b, and the second irradiation surface for irradiating to the second opening 19b is arranged concentrically with the second CCD 36a. COPYRIGHT: (C)2005,JPO&NCIPI
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