METHOD OF FORMING PIN HOLE FOR AIR NOZZLE, AIR BLOWOUT HOLE UNIT, FLOATING TRANSFER EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a method of forming a pin hole for blowing out air which has an extremely small diameter and an accurate diameter dimension. SOLUTION: Etching is conducted on a member 3a for a pin hole plate in a photolithographic process to form the fine pin hole 7 for blowing out air. The diameter of the fine pin hole 7 is set to 2.0-0.05 mm. The fine pin hole 7 is secured and held on a detachable air blowout hole unit, and can be attached to and detached from a floating stage which makes a substrate float by blowing out the air. COPYRIGHT: (C)2005,JPO&NCIPI