| 摘要 |
PROBLEM TO BE SOLVED: To resolve such a problem that there is a fear of incorporating air bubbles 14 into resist 3 because the conventional resist delivery apparatus 1 has no degassing function and, moreover, allows the resist 3 to bring into contact with air directly. SOLUTION: The resist delivery apparatus 101 is provided with a resist storing syringe 4 which has a delivery nozzle part 2 on the tip and the opened back end, a partition plate 103 which partitions the inside of the syringe 4 into a resist storing region 102 and a space region 15, a check valve 105 attached to the vicinity of a through-hole 104 disposed on the partition plate 103, a cover part 5 which shuts the syringe 4 tightly, a pressure pump 8 and a vacuum pump 106 which are connected in parallel through a connection hole 6 and a pipe 7, and a pressure control part 108 which is provided with a three way valve 107, a pressure gauge 10, a timer 11, switches a flow passage and controls pressure and time. COPYRIGHT: (C)2005,JPO&NCIPI
|
