发明名称 Composition for film formation and film
摘要 A composition for film formation and a film obtained by heating the composition. <??>The composition comprises: (A) a hydrolyzate and/or partial condensate of a compound represented by the following formula (1) R<1>nSi(OR<2>)4-n wherein R<1> and R<2> may be the same or different and each represent an alkyl group having 1 to 5 carbon atoms or an aryl group having 6 to 20 carbon atoms, and n is an integer of 1 or 2; (B) a metal chelate compound represented by the following formula (2) R<3>tM(OR<4>)s-t wherein R<3> represents a cheating agent, M represents a metal atom, R<4> represents an alkyl group having 2 to 5 carbon atoms or an aryl group having 6 to 20 carbon atoms, s represents a valence of the metal M, and t is an integer of 1 to s; (C) an organic solvent having a boiling point of 110 to 180 DEG C; and (D) beta -diketone.
申请公布号 EP0921561(A3) 申请公布日期 2004.11.24
申请号 EP19980122840 申请日期 1998.12.01
申请人 JSR CORPORATION 发明人 KUROSAWA, TAKAHIRO;YAMADA, KINJI;SHINODA, TOMOTAKA;MATSUBARA, MINORU;HAKAMATSUKA, SATOKO
分类号 C01G23/053;C01B33/149;C01G25/02;C08G77/58;C09D183/02;C09D183/14;H01L21/312 主分类号 C01G23/053
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