MATERIAL TREATING SYSTEM, MATERIAL TREATING METHOD AND CORRESPONDING GAS SUPPLY

摘要

Precursor gas supply consists of tubes (65) each containing displaceable valve and end cannula (57) with smaller inner diameter at its exit end. Volume of gas space, which is bordered by cannula, inner diameter of cannula at outlet end (59) and valve in closed position, corresponds to relation V c * A * l. A is surface of inner diameter of cannula at its exit end, l is distance between cannula exit end and valve in closed position, c is constant of less than 5 pref. less than 1.5. Independent claims included for the material processing system using the gas supply arrangement and for procedure to process work piece.