发明名称 Electronic microscope observation system and observation method
摘要 An electron microscope observation system and an observation method are provided. According to one aspect of the invention, an observation appointment and approval screen is displayed on the two image display units, and the sample preparation-processed in the observation center side based on an instruction given from the operation center is loaded, and obseration of the sample is executed based on sample observation condition information to output image information, and the observation image is displayed on the two image display units, and charge processing is executed based on a content level of the observation including preparation processing of the sample and occupying hours of the electron microscope to display the charge processing result.
申请公布号 US6822232(B1) 申请公布日期 2004.11.23
申请号 US20030333782 申请日期 2003.01.24
申请人 HITACHI LTD 发明人 TODOKORO HIDEO
分类号 G01N23/04;G01Q30/02;G01Q30/04;H01J37/26;H01J37/28;(IPC1-7):G01N23/00 主分类号 G01N23/04
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