发明名称 Apparatus for rotating a sample
摘要 An apparatus rotates a sample to facilitate an accurate analysis of the sample. The apparatus includes a sample stage on which a plurality of samples are supported, a rotatable cap and a linearly movable plate for placing a selected one of the samples at an analysis position, and a rotating stage that supports the sample stage, rotatable cap and movable plate. The rotating stage is rotatable about an axis of rotation that intersects the analysis position. Once the selected sample is placed at the analysis position by the rotation of the cap and the linear movement of the plate, the selected sample is rotated by the rotating stage. The analysis process can be selectively or sequentially carried out with respect to the plurality of samples with a high degree of efficiency and without the associated drive mechanisms experiencing high loads.
申请公布号 US6820508(B2) 申请公布日期 2004.11.23
申请号 US20020315928 申请日期 2002.12.11
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE SANG-EUN
分类号 H01J37/20;H01L21/68;H01L21/687;(IPC1-7):G01N37/00 主分类号 H01J37/20
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