发明名称 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus |
摘要 |
A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time At from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.
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申请公布号 |
US6820632(B2) |
申请公布日期 |
2004.11.23 |
申请号 |
US20020162552 |
申请日期 |
2002.06.06 |
申请人 |
FUJIKIN INCORPORATED;OHMI TADAHIRO;TOKYO ELECTRON LTD. |
发明人 |
OHMI TADAHIRO;KAGATSUME SATOSHI;SUGIYAMA KAZUHIKO;MINAMI YUKIO;NISHINO KOUJI;DOHI RYOUSUKE;YONEHANA KATSUNORI;IKEDA NOBUKAZU;YAMAJI MICHIO;HIROSE JUN;FUKAZAWA KAZUO;KOIZUMI HIROSHI;NAGAOKA HIDEKI;MORIMOTO AKIHIRO;UNO TOMIO;IDETA EIJI;MATSUMOTO ATSUSHI;UENOYAMA TOYOMI;HIROSE TAKASHI |
分类号 |
G05D7/06;(IPC1-7):G05D7/06 |
主分类号 |
G05D7/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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