发明名称 Dual doped gates
摘要 A method of forming an integrated circuit dual gate structure using only one mask is disclosed. In one embodiment, a substrate is prepared for the fabrication of a dual gate structure, a first gate structure having an NWELL is formed without using a mask, and a second gate structure having a PWELL is formed using only one mask. In an alternate embodiment, a substrate is prepared for the fabrication of a dual gate structure, a first gate structure having a PWELL is formed without using a mask, and a second gate structure having an NWELL is formed using only one mask.
申请公布号 US6821852(B2) 申请公布日期 2004.11.23
申请号 US20010782743 申请日期 2001.02.13
申请人 MICRON TECHNOLOGY, INC. 发明人 RHODES HOWARD E.
分类号 H01L21/265;H01L21/8238;(IPC1-7):H01L21/823 主分类号 H01L21/265
代理机构 代理人
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