| 发明名称 |
Method of chemically altering a silicon surface and associated electrical devices |
| 摘要 |
A method of chemically altering a silicon surface and associated dielectric materials are disclosed.
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| 申请公布号 |
US6822308(B2) |
申请公布日期 |
2004.11.23 |
| 申请号 |
US20030600665 |
申请日期 |
2003.06.20 |
| 申请人 |
LSI LOGIC CORPORATION |
发明人 |
ARONOWITZ SHELDON;ZUBKOV VLADIMIR |
| 分类号 |
H01L21/306;H01L21/31;(IPC1-7):H01L29/00 |
主分类号 |
H01L21/306 |
| 代理机构 |
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