| 摘要 |
PURPOSE: A nano-slide integrated nano-probe array is provided to sequentially or simultaneously measure near field optical characteristics of nano-structure specimens disposed on a slide arranged to cover openings having nano-meter widths. CONSTITUTION: A nano-slide integrated nano-probe array comprises a plurality of openings(13a,15a) arranged on a plurality of through holes(13,15) formed at a base(10), wherein the openings have nano-meter widths; and a slide(17) coupled onto the base in such a manner that the slide covers the openings, wherein the slide is optically transparent and has a nano-meter thickness. The nano-probe array sequentially or simultaneously measures near field optical characteristics of specimens(T) disposed on the slide, through the openings.
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