| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an atmospheric pressure plasma treatment method with a simple constitution where the deposition of a uniform film is possible correspondingly to the various widths of base materials without causing the problems as for the change in the curling of a base material, deterioration in the shape of rolling and its fracture in the process of conveyance, and to provide a system used therefor. <P>SOLUTION: In the atmospheric plasma treatment system, discharge plasma is generated by applying high frequency voltage to the space between confronted electrodes under the atmospheric pressure or under the pressure in the vicinity of the atmospheric pressure, and a thin film is deposited on the surface of an arranged base material, and a means of changing the area of the opening confronted with the base material in a gas feeding part feeding a discharge gas to a discharge plasma generating part is provided. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
