| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problems of oxidation of barrier metals, oxygen deficiency, and difficulty in micromachining. <P>SOLUTION: The oxygen concentration at a second upper electrode 8B is set higher than the oxygen concentration of a first upper electrode 8A. Consequently, the oxygen concentration of the first upper electrode 8A is lowered, resulting in the oxidation of the barrier metal 4 due to oxygen diffusion hardly occurring. Further, the increased oxygen concentration of the second upper electrode 8B permits the oxygen content for the entire upper electrodes to be maintained to a degree, thereby allowing the capacitor dielectric substance to be less likely to be reduced. Then the provision above eliminates the need for thickening the film thickness of the entire upper electrodes by a large amount and further, this manufacturing method does not make the oxygen concentration of the upper electrode 8A to be zero. Thus, it is not required to drastically increase the oxygen concentration which the second upper electrode 8B shares. The first upper electrode 8A imparts the advantage that it is less likely to be exfoliated during annealing under a hydrogen atmosphere. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
