| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser machining apparatus with a function to apply a protective coating over a surface of a work to be processed. <P>SOLUTION: The laser machining apparatus, equipped with a chuck table 36 to hold the workpiece and a laser beam irradiation means 524 to project a laser beam to the workpiece held on the chuck table 36, has also a protective coating application means 7 to apply the protective coating over the face of the workpiece to be machined ahead of the laser machining. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
