ANALYTICAL METHOD OF MOLECULAR CONTAMINANT

摘要

PROBLEM TO BE SOLVED: To improve measurement accuracy by making the analysis environment approximate to an actual clean room environment in a method of analyzing a molecular contaminant generated from a clean room component and adsorbed to a material to be treated. SOLUTION: The clean room component S and the material to be treated P are allowed to exist in the same vessel 2. When analyzing the molecular contaminant generated from the clean room component S and adsorbed to the material P to be treated, a carrier gas G having the flow rate whose wind velocity on the surface of the component S is scheduled to be 3×10-5to 7×10-4m/s is allowed to pass in the vessel 2, and the inside of the vessel S is stirred to thereby increase the wind velocity of the carrier gas G on the surface of the component S from the scheduled value to a prescribed value. COPYRIGHT: (C)2005,JPO&NCIPI