发明名称 |
RADIATION SENSOR, WAFER, SENSOR MODULE, AND METHOD FOR THE PRODUCTION OF A RADIATION SENSOR |
摘要 |
Disclosed is a radiation sensor (10) comprising a support (1), a lowered area (2) that is embodied within a surface of the support (1) and can represent a depression or a through hole, a sensor element (4, 4a, 4b) which is embodied above the lowered area (2), preferably on a membrane (3) spanning the lowered area (2), and electrical contacts (5, 5a, 5b) for the sensor element (4, 4a, 4b). The lowered area (2) has an entirely or partly rounded contour (2a) within the surface of the support (1). |
申请公布号 |
WO2004099063(A2) |
申请公布日期 |
2004.11.18 |
申请号 |
WO2004EP04841 |
申请日期 |
2004.05.06 |
申请人 |
PERKINELMER OPTOELECTRONICS GMBH & CO. KG;HAUSNER, MARTIN;SCHILZ, JUERGEN;PLOTZ, FRED;KARAGOEZOGLU, HERMANN |
发明人 |
HAUSNER, MARTIN;SCHILZ, JUERGEN;PLOTZ, FRED;KARAGOEZOGLU, HERMANN |
分类号 |
G01J5/10;G01K7/02;G01K7/22 |
主分类号 |
G01J5/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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