发明名称 |
Selective promotion for resolution enhancement techniques |
摘要 |
A tool for optimizing the layout of a microdevice adds fragmentation points to polygons in a first hierarchical database layer in a manner suitable for application of a tool to apply a resolution enhancement technique (RET) such as optical and process correction (OPC). Portions of polygons in a database level that interact with polygons of a second level in the database are promoted to the second database level, and refragmented. The RET operates on the polygons of the first and second levels of the database to determine how polygons of each of the first and second levels should be adjusted, if necessary, such that the layout is optimized.
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申请公布号 |
US2004230936(A1) |
申请公布日期 |
2004.11.18 |
申请号 |
US20030730765 |
申请日期 |
2003.12.08 |
申请人 |
MENTOR GRAPHICS CORPORATION |
发明人 |
COBB NICOLAS B.;GRODD LAURENCE W.;LIPPINCOTT GEORGE P.;SAHOURIA EMILE |
分类号 |
G03F1/14;(IPC1-7):G06F17/50 |
主分类号 |
G03F1/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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