| 发明名称 |
ACID DISSOCIABLE GROUP-BEARING POLYMER AND RADIATION-SENSITIVE RESIN COMPOSITION |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acid dissociable group-bearing polymer that has high radiation transparency and satisfies the basic performance required for resists, and obtain a radiation-sensitive resin composition. <P>SOLUTION: The acid dissociating group-bearing polymer has recurring units represented by formula (1) (wherein (n) is 0 or 1). The radiation-sensitive resin composition contains the polymer. The radiation-sensitive resin composition comprises the polymer and a radiation-sensitive acid-dissociation agent. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
| 申请公布号 |
JP2004323768(A) |
申请公布日期 |
2004.11.18 |
| 申请号 |
JP20030123381 |
申请日期 |
2003.04.28 |
| 申请人 |
JSR CORP;UNIV KANAGAWA |
发明人 |
NISHIKUBO TATATOMI;KUDO HIROTO |
| 分类号 |
G03F7/033;C08F8/18;G03F7/039;H01L21/027 |
主分类号 |
G03F7/033 |
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