| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate holder capable of holding substrates having different sizes, facilitate handling of the substrate to prevent drop of the substrate, reduce kind and the number of required substrate holders in the manufacture of an electronic device and a photomask to reduce facility costs, and facilitate handling of the substrate to improve productivity. <P>SOLUTION: This substrate holder 10 is provided with a substrate holding part 12 holding the square substrate 1 in such a way that its main surface is along the vertical direction and supporting two adjacent sides of the substrate 1 from below while they are inclined by a predetermined angle. In a process for manufacturing the electronic device and the photomask by applying predetermined treatment to the substrate 1, the substrate 1 is held by the substrate holder 10 when letting the substrate stand-by temporarily and storing and conveying it. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
