| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect correction device capable of high accuracy correction of defects having a variety of dimensions and also to provide a laser-output decision system to be employed for the defect correction device. SOLUTION: A defect correction device 1 is a defect correction device for repairing defects on a substrate and is provided with a laser output mechanism 10 capable of varying the cross-sectional area of the irradiating laser. In this laser output mechanism 10 the processing conditions are changed depending on the cross-sectional area. COPYRIGHT: (C)2005,JPO&NCIPI |
