MICRO PARTICLES INJECTING PROCESS USING DIRECT MASK ON WORKPIECE TO FORM PATTERN WITH ULTRA-FINE CD

摘要

PURPOSE: Micro particles injecting process using a direct mask on a workpiece is provided to form a pattern with an ultra-fine CD(critical dimension) and enable minimal machining by forming a pattern directly on the workpiece to fabricate a mask. CONSTITUTION: A brittle material such as silicon or glass is formed by using micro particles injecting process and a photolithography technique. Photocurable resin and ultraviolet rays are used in fabricating a mask for the micro particles injecting process. A mask pattern(16) for only the micro particles injecting process is formed by using photoresist(SU-8 and the like) wherein a metal mask is generated.