发明名称 COPOLYMER FORMULATION FOR DIRECTED SELF ASSEMBLY, METHODS OF MANUFACTURE THEREOF AND ARTICLES COMPRISING THE SAME
摘要 Disclosed is a composition comprising a block copolymer, an additive polymer, and a solvent. The block copolymer comprises a first polymer and a second polymer, wherein the first polymer and the second polymer of the block copolymer are different from each other, and the block copolymer forms a phase separated structure. The additive polymer comprises a polymer, wherein the surface tension of the polymer with the first polymer and the surface tension of the polymer with the second polymer are both lower than the surface tension between the first polymer and second polymer, and the additive polymer comprises a reactive functional moiety which forms a bond, a complex, or a coordinate with the substrate upon being disposed on the substrate while the reactive functional moiety is unreacted when it is a part of the composition.
申请公布号 KR20160081801(A) 申请公布日期 2016.07.08
申请号 KR20150181017 申请日期 2015.12.17
申请人 ROHM AND HAAS ELECTRONIC MATERIALS LLC;DOW GLOBAL TECHNOLOGIES LLC 发明人 PHILLIP D. HUSTAD;JIEQIAN ZHANG;PETER TREFONAS III
分类号 C08L25/06;C08L23/08;C08L33/04 主分类号 C08L25/06
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