发明名称 |
Power measurement mechanism for a transformer coupled plasma source |
摘要 |
According to one embodiment, an apparatus is described. The apparatus includes a vacuum chamber and an electrical transformer to induce an electromagnetic field within the vacuum chamber. The transformer includes a primary winding, a secondary winding formed by the plasma loop, and a separate secondary winding implemented to measure the voltage along the plasma loop. The apparatus also includes a current transformer to measure the current flow through the plasma loop.
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申请公布号 |
US6819096(B2) |
申请公布日期 |
2004.11.16 |
申请号 |
US20030356176 |
申请日期 |
2003.01.31 |
申请人 |
ADVANCED ENERGY INDUSTRIES, INC. |
发明人 |
GONZALEZ JUAN JOSE;GEISSLER STEVEN J.;TOMASEL FERNANDO GUSTAVO |
分类号 |
G01R31/00;G01R33/00;H01F;H01F27/28;H01J37/32;(IPC1-7):G01R31/00 |
主分类号 |
G01R31/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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