Enhanced photo-EMF sensor with high bandwidth and large field of view

摘要

A photo-EMF sensor and a method of making same has a substrate with a semiconducting layer; a plurality of sensing regions in the layer, each sensing region including (i) a pair of electrodes disposed in, on or above the layer and (ii) an active region in the layer disposed adjacent said pair of electrodes; and a plurality of inactive regions in said the arranged between adjacent sensing regions. The inactive regions and the sensing regions are dosed with a desensitizing agent, the inactive regions receiving a relatively higher dose of the desensitizing agent and the sensing regions receiving a relatively lower dose of the desensitizing agent. The active layer is preferably placed in a monolithic Fabry-Perot cavity to enhance the optical efficiency and performance of the sensor.