ELECTRODE FOR SEMICONDUCTOR FABRICATION PROCESS TO ENHANCE PRODUCTIVITY

摘要

PURPOSE: An electrode for semiconductor fabrication process is provided to reduce the cost of consumable parts and troubles due to components, prevent reduction of efficiency of fabrication equipment, and enhance the productivity by improving a structure of the electrode. CONSTITUTION: An electrode for semiconductor fabrication process is formed with SiC. The electrode for semiconductor fabrication process further includes a plurality of gas distribution holes(12). The electrode is formed with a clamp type SiC electrode(10a). The gas distribution holes are formed on a planarized SiC plate.