INKJET RECORDING HEAD, ITS MANUFACTURING METHOD, AND INKJET RECORDER

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an inkjet recording head in which a large number of piezoelectric elements two-dimensionally arranged at a high density for a matrix arrangement head are easily manufactured through a simple manufacturing process, while forming a piezoelectric plate into an arbitrary shape.

SOLUTION: The inkjet recording head comprises: a plurality of pressure chambers 12a two-dimensionally arranged and communicating with an ink chamber; and the plurality of piezoelectric elements 14a for driving respective pressure chambers 12a wherein ink in the pressure chambers 12a is pressurized through action of the piezoelectric elements 14a, and ejects ink drops from nozzles 11a communicating with the pressure chambers 12a. In the manufacturing method, the piezoelectric plate separably bonded to a substrate 23 is patterned to form a piezoelectric element unit in which the plurality of piezoelectric elements 14a are two-dimensionally arranged on the substrate 23. The respective piezoelectric elements 14a of the piezoelectric element unit are bonded to a diaphragm 13, and then the substrate 23 is stripped from the respective piezoelectric elements 14a.

COPYRIGHT: (C)2005,JPO&NCIPI