| 摘要 |
PROBLEM TO BE SOLVED: To provide a microchemical chip which is manufactured with high productivity at a low cost, has excellent chemical resistance and can be used under various conditions and to provide a method for manufacturing the microchemical chip. SOLUTION: This microchemical chip is obtained by forming a groove part 36 by printing a pattern of the predetermined shape on the surface of a ceramic green sheet 32, layering another ceramic green sheet 31 to cover the part 36 and sintering the layered sheets 31, 32 at the prescribed temperature so that a substrate consisting of a ceramic material having a flow passage through which the fluid to be treated is circulated is formed. Since this microchemical chip is manufactured with high productivity at a low manufacturing cost, this microchemical chip is inexpensive. COPYRIGHT: (C)2005,JPO&NCIPI |
