LAYER THICKNESS VARIABLE OPTICAL MICRO-SHAPING METHOD AND LAYER THICKNESS VARIABLE OPTICAL MICRO-SHAPING APPARATUS

摘要

PROBLEM TO BE SOLVED: To realize fast scanning while avoiding a problem wherein surface resolving power is lowered if quantity of light is increased and to avoid a problem wherein a focus or a position is shifted when an object lens different in the number of apertures or magnification is ready to be replaced to lose the shaped article in a resin. SOLUTION: The number of the apertures of the object lens 14 is increased when a thin and small region is cured to form microspots while reduced when a thick region is cured to increase the intensity of light. By this method, the thickness of a cured layer of a photosetting resin 16 is changed corresponding to situations so as to increase the cured region in a thickness direction while throttling an in-plane direction. COPYRIGHT: (C)2005,JPO&NCIPI