发明名称 |
Method of manufacture of a curling calyx thermoelastic ink jet printer |
摘要 |
A method of manufacturing an ink jet printhead includes providing an initial semiconductor wafer having an electrical circuitry layer formed thereon. A nozzle ink inlet hole is etched in the circuitry layer. A first sacrificial material layer is deposited over the electrical circuitry layer and is etched to define an actuator anchor area. A first expansion material layer of a material having a desired coefficient of thermal expansion is deposited and etched to define predetermined vias. A first conductive layer is deposited on the first expansion material layer. The first conductive material layer is etched to be conductively interconnected to the electrical circuitry layer. A second expansion material layer of a desired coefficient of thermal expansion is etched to form a disk centered about the vias. A second sacrificial material layer is deposited and etched to form a nozzle chamber mould. An inert material layer is deposited over the second sacrificial material layer and etched to form a nozzle chamber. An ink supply channel is etched through the wafer and the sacrificial layers are etched away.
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申请公布号 |
US6241905(B1) |
申请公布日期 |
2001.06.05 |
申请号 |
US19980113118 |
申请日期 |
1998.07.10 |
申请人 |
SILVERBROOK RESEARCH PTY LTD |
发明人 |
SILVERBROOK KIA |
分类号 |
B41J2/14;B41J2/16;B41J2/165;B41J2/175;B41J3/42;B41J3/44;B41J11/70;B41J15/04;B42D15/10;H04N1/21;H04N5/225;H04N5/262;(IPC1-7):B41J2/16 |
主分类号 |
B41J2/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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