CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam device allowing a function in use to be quantitatively grasped from multiple functions, and allowing a function required for operation to be easily visually recognized. SOLUTION: A function for counting and keeping the number of use of icons used on a GUI operation screen is added. The color of a icon used frequently relative to a preset threshold value of frequency of use is changed based on the data thereof. Thus, it can be visually differentiated from less-frequently used icons, so that the icon required for operation can easily be recognized. COPYRIGHT: (C)2005,JPO&NCIPI