| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid feed device capable of feeding liquid at from minute flow rate to large flow rate. SOLUTION: The liquid feed device has a flexible minute flow passage 300 formed in a flat plate and is provided with an actuator 400 deforming the minute flow passage 300. The actuator 400 expands and contracts and is used both as a pump and a valve. COPYRIGHT: (C)2005,JPO&NCIPI
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