THERMAL TYPE INFRARED DETECTOR AND INFRARED FOCAL PLANE ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a highly accurate and low-noise thermal type infrared detector of a new structure. SOLUTION: A temperature sensor 103 of which the electric characteristics change according to temperature changes due to the absorption of infrared rays; a heat insulating support leg 102 for thermally insulating and supporting the temperature sensor 103 to be a wire for reading an electric signal from the temperature sensor 103; and an infrared absorbing layer 101 formed in such a way as to be thermally in contact with the temperature sensor 103 are provided over a substrate 105. The temperature sensor 103; the heat insulating support leg 102; and the infrared absorbing layer 101 are formed in planes spatially separated and different from each other. COPYRIGHT: (C)2005,JPO&NCIPI