| 摘要 |
PROBLEM TO BE SOLVED: To provide substrate treatment equipment which can recognize that a measured value is approximate to an abnormal value when performing equipment control based on the measured values of analogue quantity at individual portions. SOLUTION: Control means comprising the substrate treatment equipment has two preset threshold values with respect to measuring objects. Upon obtaining the measured value, the control means determines which of a normal value, an intermediate value or an abnormal value the measured value belongs to, with the two threshold values being boundaries. The intermediate value represents that a series of treatments can be continued but measured portions are required to be adjusted. When the measured value is the normal value, the series of treatments are continued. When the measured value is the intermediate value, warning is given while the series of treatments are continued. When the measured value is the abnormal value, the series of treatments are stopped. Thus, the controller of the equipment can recognize that the measured value is approximate to the abnormal value while continuing the series of treatments. COPYRIGHT: (C)2005,JPO&NCIPI
|
