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发明名称
摘要
申请公布号
JP3586678(B2)
申请公布日期
2004.11.10
申请号
JP20020111143
申请日期
2002.04.12
申请人
发明人
分类号
H01L21/3065;H01L21/311;H01L21/3213;H01L21/76;H01L21/762;(IPC1-7):H01L21/306
主分类号
H01L21/3065
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代理人
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地址
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