Method and apparatus for conditioning a gas flow to improve a rate of pressure change measurement,申请号US20030391829-传众专利搜索

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发明名称	Method and apparatus for conditioning a gas flow to improve a rate of pressure change measurement
摘要
申请公布号	US6813943(B2)	申请公布日期	2004.11.09
申请号	US20030391829	申请日期	2003.03.19
申请人	MKS INSTR INC	发明人	SMITH JOHN A;SHAJII ALI
分类号	G01F1/34;G05D7/01;G05D7/06;(IPC1-7):G01F15/04	主分类号	G01F1/34
代理机构		代理人
主权项
地址

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