CANTILEVER TYPE FILM BULK ACOUSTIC RESONATOR AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A cantilever type FBAR(Film Bulk Acoustic Resonator) and a manufacturing method thereof are provided to simplify manufacturing processes, to improve Q value, and to connect easily the same with outer terminals by exposing an upper and lower electrode. CONSTITUTION: An insulating layer(110) is deposited on a substrate(100). A sacrificial layer is deposited on the insulating layer and patterned. A lower electrode(120) is deposited thereon and patterned. A piezoelectric layer(130) is deposited on the lower electrode and patterned. An upper electrode(140) is deposited on the piezoelectric layer and patterned. The sacrificial layer is removed from the resultant structure by using etching, so that an air gap(170) is formed under the lower electrode.