SEMICONDUCTOR WAFER TRANSFER ARM TO EASILY CORRECT FORK AND AVOID PARTICLES

摘要

PURPOSE: A semiconductor wafer transfer arm is provided to easily correct a fork by installing an angle control part in a fork part and to avoid particles by using a stainless steel material. CONSTITUTION: A vacuum line(22) is formed in a main body(20). A fork part(21) is connected to the main body, including a vacuum hole(23) and a fork. The vacuum hole comes in contact with the rear surface of a wafer to be capable of absorbing the wafer by vacuum pressure. A vacuum line for forming vacuum pressure in the vacuum hole is formed in the fork of a thin plate type wherein the fork is connected to the vacuum line of the main body. An angle control part(24) controls the angle of the fork part, installed in the connection part of the main body and the fork part.