发明名称 |
MICRODEVICE ASSEMBLY HAVING A FINE GRAIN GETTER LAYER FOR MAINTAINING VACUUM |
摘要 |
A microdevice assembly (20) that includes a device microstructure (22), a housing (30), and a fine grain getter layer (40). The housing (30) has a base portion (32) and a lid (34). The device microstructure (22) is attached to the base portion (32) and the lid (34) is hermetically sealed to the base portion (32). The housing (30) defines a cavity (38) surrounding the device microstructure (22). The fine grain getter layer (40) is on an interior side (42) of the lid (34) for maintaining a vacuum in the cavity (38) surrounding the device microstructure (22). The lid (34) may be made of metal or have at least a metallic surface in the region where the fine grain getter layer (40) is applied. The fine grain getter layer (40) has a sub-micron grain size. There is also a method for making the microdevice assembly (20). |
申请公布号 |
WO2004094298(A2) |
申请公布日期 |
2004.11.04 |
申请号 |
WO2004US03405 |
申请日期 |
2004.02.05 |
申请人 |
MOTOROLA INC;WANG JOE P;FIELD CHERYL B;PFEIFER MICHAEL |
发明人 |
WANG JOE P;FIELD CHERYL B;PFEIFER MICHAEL |
分类号 |
B81B;B81B1/00;B81B7/00;H01J9/38;H01J19/70 |
主分类号 |
B81B |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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