发明名称 Annealing oven with heat transfer plate
摘要 In general, the present invention is directed toward improved heat transfer in vacuum ovens. The oven of the invention generally comprises a shell into which a removable rack may be placed. The rack has at least one plate which may be heated or cooled by a plate fluid conduit in contact with the plate and through which a heating or cooling fluid may be passed. Work pieces may be loaded in the rack, the rack placed in the shell, the shell sealed, and a vacuum drawn within the shell. The lack of atmosphere within the shell suggests that the work pieces loaded on the rack are primarily heated and cooled by conductive and radiant heat transfer. This method of cooling the work pieces while under a vacuum environment provides the advantage of faster cooling of the work pieces which results in higher utilization of the oven and shorter cycle times.
申请公布号 US2004218913(A1) 申请公布日期 2004.11.04
申请号 US20030428397 申请日期 2003.04.30
申请人 MELGAARD HANS L. 发明人 MELGAARD HANS L.
分类号 A21B2/00;F27B5/04;F27B5/14;F27B17/00;F27D9/00;F27D11/00;F27D11/02;F27D99/00;H01L21/00;(IPC1-7):F27B5/14 主分类号 A21B2/00
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