| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for measuring the lens focal position of a microchemical system, which can accurately measure the focal position of a lens included in a probe, and to provide the microchemical system and a method for positioning the lens of the microchemical system. SOLUTION: The method 100 for measuring the lens focal position is provided with a probe 50 which condenses light from a light source 53 by using an irradiation lens 40, a flat mirror 55 which is disposed on the output side of the probe 50, a holding mechanism 56 which holds the flat mirror 55, and a detector 54 which detects the intensity of light being reflected by the flat mirror 55. The holding mechanism 56 enables the flat mirror 55 to be made to slope through minute anglesθx,θy about the x-axis and y-axis, respectively, while making the flat mirror 55 move a distance z in the direction of z-axis of the probe 50. While the light, irradiated from the light source 53 via the irradiation lens 40, included in the probe 50 and the intensity of the reflected light is detected by using the detector 54, the flat mirror 55 is adjusted through the minute anglesθx,θy and moved in the direction of the z-axis. COPYRIGHT: (C)2005,JPO&NCIPI
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