发明名称 Electroplating bath
摘要 Copper electroplating baths containing one or more suppressor compounds capable of providing copper filled sub-micron sized apertures free of pits and voids are provided. Such copper electroplating baths are useful in the manufacture of electronic devices, such as printed wiring boards and integrated circuits.
申请公布号 US2004217009(A1) 申请公布日期 2004.11.04
申请号 US20030717774 申请日期 2003.11.20
申请人 SHIPLEY COMPANY, L.L.C. 发明人 MIKKOLA ROBERT D.;WANG DEYAN;WU CHUNYI
分类号 C25D3/38;C25D7/06;C25D7/12;H01L21/288;H05K3/42;(IPC1-7):C25D3/38 主分类号 C25D3/38
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