| 摘要 |
PROBLEM TO BE SOLVED: To stabilize characteristics of an organic EL device by uniforming the distribution of film thicknesses of a hole-transport layer, an emitting layer and an electron-transport layer or the like constituting the organic EL device formed on an insulating substrate, and also by uniforming the temperature distribution of the insulating substrate. SOLUTION: A depositing beam 201 is emitted from a depositing beam generating source 200 to deposit an organic EL material on the insulating substrate 10 through a shadow mask 100. The depositing beam generating source 200 is scanned from one end of the insulating substrate 10 to the other end, and at the same time the source is rotated in a reciprocative manner between predetermined maximum rotation angles centered on a longitudinal midpoint P of the depositing beam generating source 200, by which a scanning distance becomes longer at the end of the depositing beam generating source 200 as compared with its central part, and the thinning of the film thickness of a deposited film is suppressed correspondingly. COPYRIGHT: (C)2005,JPO&NCIPI
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