GAS FEED LINE STRUCTURE

摘要

The problem is to provide a gas feed line structure that is well suited for supplying feed gases that contain 1% or more fluorine gas. A gas feed line structure for supplying a feed gas that contains 1% or more fluorine gas to a main process apparatus (10) has gas feed lines (48) and (28a) that connect a main process apparatus (10) to a feed gas source (32) and also has adsorption devices (52) and (54) that are disposed on said gas feed lines (28a) and (48). These adsorption (10) devices (52) and (54) contain an adsorption layer (66) that is composed mainly of a nickel sinter and that is traversed by the feed gas being supplied to the main process apparatus (10).