| 摘要 |
PROBLEM TO BE SOLVED: To provide an automatized microscopic device in which information enough to specify a faulty or consumed mechanism is storable. SOLUTION: The microscopic device is equipped with a microscope equipped with a plurality of mechanisms (12x, 12y, 15 and 16) for changing observation environment, control means (120, 112, 115 and 116) for driving a plurality of mechanisms in compliance with various instructions from a user, and log recording means (120, 120a, 12x', 12y', 15', 16' and 120b) time-sequentially recording log data indicating whether each of the plurality of mechanisms driven in compliance with the instructions is normally driven or abnormally driven in association with the kind of the instruction. COPYRIGHT: (C)2005,JPO&NCIPI
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